PDF《VD 系列高 压直 流电 源》

产品特点 Features 产品用途 Application VD 系列高压直流电源 VD Series High voltage DC power supply 高控制精度,低纹波 高效控制方案,系统效率高 模块化设计,系统维护方便 快速灵活高效的打火保护策略,提高电源可靠性 采用光纤通讯,提高电源安全性,系统抗干扰能力强 集成冷却故障,过流、过热、负载打火、充电故障等 保护功能 可集成负高压、灯丝、磁场等电源 产品主要应用于半导体制备工艺、真空/等离子处理工艺、 静电技术应用、粒子加速器、电子束高压激发、高压设备 测试、微波加热等行业领域.

Product mainly used in semiconductor manufacturing process, vacuum / plasma processing technology, electrostatic technology applications, particle accelerator, high voltage excitation of electron beam, high voltage equipment testing, microwave heating and other industries. High control precision, low ripple Efficient control scheme, high system efficiency Modular design, convenient system maintenance Flexible and efficient ignition protection , improve the reliability of power supply Using optical fiber communication to improve power supply security, the system has strong anti-interference ability Integrated cooling fault, overcurrent, overheating, load arcing, charge fault, etc Could be integrated negative high voltage, filament, magnetic field and other power supply VD

10 - T /- 输入电压 额定输出电流 额定输出电压 设计序号 行业代码 高压直流电源 Input voltage Rated current Rated voltage Design serial number Industry code High voltage DC power supply 型号定义 Model Definition 规格参数 Specification 输入 输入电压 3ΦAC 380V±10% 输入频率 50/60Hz 转换效率 ≥93% 输出 额定电压 DC 8~80kV,特殊可定制 额定功率 3kW~600kW,特殊可 制定性能指标 稳定度 优于2% 纹波 ≤1% 功率因数 ≥0.97 给定方式 模拟、通讯、数字 冷却方式 水冷 水质要求 纯水或去离子水 水流量 40L/min 水压 0.15MPa~0.3MPa 进水温度 18℃~35℃ 2200mm*1200mm*1200mm(H*W*D), 可根据客户要求定制 通讯接口 标准配置RS485通讯接口,可根据用户需求定制 参考尺寸 主要特性 Input Input voltage

3 AC 380V±10% Φ Input frequency 50/60Hz Efficiency ≥93% Output Rated voltage DC 8~80kV,could be customized Rated power 3kW~600kW,could be customized Performance index Stability better than 2% Ripple ≤1% Power factor ≥0.97 Setting mode Analog, communication, digital Communication interface Standard RS485 communication interface, can be customized according to user needs Cooling mode Water cooling Water quality requirements Pure water or deionized water Water flow 40L/min Water pressure 0.15MPa~0.3MPa Inlet temperature

18 ~35 ℃ ℃ 2200mm*1200mm*1200mm(H*W*D), Can be customized according to customer requirements Reference dimension Main features 版本号:167 CL20180813,本资料所涉及内容、图片等知识产权均归属于本公司,未经授权不得使用.图中内容以实物为准,本公司具有最终解释权. Version number:167 CL20180813,The information, pictures and other intellectual property rights involved in the content are attributable to the company, without authorization shall not be used. The pictures of the contents in kind prevail, the company has the final interpretation right. 地址:四川省德阳市金沙江西路686号 销售热线:0838-2900585 、586 传真:0838-2900985

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