PDF《An Introduction to》

1 An Introduction to Microelectromechanical Systems(MEMS) Bing-Feng Ju, Professor Institute of Mechatronic Control Engineering, College of Mechanical and Energy Engineering, Zhejiang University P.

R.China,

310027 Email: mbfju@zju.edu.cn Tel: 86-571-8795-1730 Fax: 86-571-8795-1941 Presented to Graduate students at College of Mechanical and Energy Engineering Zhejiang University February to May

2010 Who am I? Education: Ph.D. from Zhejiang University,

1999 MEng from Harbin Institute of Technology,

1996 BEng from Harbin Institute of Technology,

1994 (All degrees were in mechanical engineering;

Ph.D. thesis in Precision Metrology) Research and Teaching experiences: 2006.12-Present College of Mechanical and Energy Engineering, Zhejiang University Position: Professor (2007.12 Ph.D. Tutor Qualification) 2004.12-2007.04 Department of Nanomechanics, Tohoku University(东北大学), Japan Position: Assistant Professor 2003.11-2004.11 Department of Nanomechanics, Tohoku University(东北大学), Japan Position: JSPS Young Foreigner Scientist 2002.05-2003.11 DSO National Laboratories, Singapore Position: Research Scientist Adjunct Assistant Professor of National University of Singapore (NUS) 2000.05-2002.05 School of Mechanical &

Aerospace Engineering, Nanyang Technological University (NTU), Singapore Position: Postdoctoral Research Fellow Courses taught: BioMEMS, Precision &

Nao Metrology CONTENT Self-introduction 1. Overview of MEMS and Microsystems Working Principles of Microsystems 2. The Scaling Laws Electromechanical Design of MEMS and Microsystems 3. Material for MEMS and Microsystems Part 1: Silicon and silicon compounds Part 2: Piezoelectric and polymers 4. Microfabrication Processes Part 1: Photolithography, doping with ion implantation and diffusion Part 2: Etching Part 3: Depositions: physical, chemical and epitaxy 5. Micromanufacturing Assembly, Packaging and Testing to Nanoscale Engineering Part 1: Microassembly Part 2: Packaging with surface and wire bonding Part 3: Reliability and testing 6. Introduction to Nanoscale Engineering Part 1: Overview of nanoscale engineering Part 2: Material characterization and measurements Textbooks: 1. MEMS and Microsystems: design and manufacture, by Tai-Ran Hsu, McGraw-Hill Companies, Boston,

2002 (ISBN 0-07-239391-2) 中译本:徐泰然, 《 MEMS和微系统―设计与制造》 ,机械工业出版社,2004 2. Albert P. Pisano, An Introduction to Microelectromechanical Systems Engineering, Artech House,

2000 3. Marc Madou, Fundamentals of Microfabrication, CRC Press,

2002 4. 庄达人,《VLSI制造技术》,高立图书有限公司,1996 Journals: 1. Journal of MEMS http://www.ieee.org/pub_preview/mems_toc.html 2. Sensors Journal, IEEE http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?puNumber=7361 3. Journal of Micromechanics and Microengineering http://www.iop.org/Journals/jm Covering microelectronics and vacuum microelectronics, this journal focuses on fundamental work at the structural, devices and systems levels, including new developments in practical applications. 4. Sensors and Actuators A: Physical http://www.elsevier.com:80/inca/publications/store/5/0/4/1/0/3/

2 MEMS-Related Newsletters: ? Micromachine Devices is a very thorough newsletter on MEMS and the MEMS industry. Contact the editor Mr. Sid Marshall at:sid_marshall@msn.com for your free subscription. ? R&

D Magazine periodically contains articles on MEMS and related areas. Alternative website: http://www.manufacturing.net/magazine/rd/index.htm ? MST News based in Germany is a newsletter (available in English) which focuses on European MEMS/MST activities. Also available from MST are special reports on US and Japanese MEMS/MST activities. ? Sensor Business Digest covers the sensor industry. Contact the editor Peter Adrian for subscription information at: 415-345-7018. ? Microtechnology News published by the Business Communications Company, Inc. (BCC) offers an on-line sample issue. (http://www.vdivde-it.de/mst) ? Nanotech Alert is a newsletter from John Wiley &

Sons Technical Insights, covering the MEMS and Nanotechnology industries. (http://www.wiley.com/technical_insights) ? Sensors Magazine is a general magazine covering all aspects of the sensors industry. (http://www.sensorsmag.com/) Lecture 1(Part I) Overview of MEMS and Microsystems Unit 10-9m-nm:nano-meter 10-6m-?m:micro-meter 10-3m-mm:milli-meter 10-2m-cm:centi-meter 10-1m-dm: deci-meter 10-15m-fm:femto-meter 10-12m-pm:pico-meter 10-18m-am:atto-meter 106m-Mm:mega-meter 109m-Gm:giga-meter 1012m-Tm:tera-meter 102m-hm:hecto-meter 103m-km:kilo-meter 101m-dam:deca-meter 100m-m:meter WHAT IS MEMS? MEMS = MicroElectroMechanical System Any engineering system that performs electrical and mechanical functions with components in micrometers is a MEMS. (1 ?m = 1/10 of human hair) Available MEMS products include: Microsensors (To sense and detect certain physical, chemical, biological and optical quantity and convert it into electrical output signal) Microactuators (to operate a device component, e.g., valves, pumps, electrical and optical relays and switches;

grippers, tweezers and tongs;

linear and rotary motors;

micro gyroscopes, etc.) Read/write heads in computer storage systems. Inkjet printer heads. Microdevices components (palm-top reconnaissance aircrafts, toy cars, etc.)

3 HOW SMALL ARE MEMS DEVICES? They can be of the size of a rice grain, or smaller! Three examples: - Inertia sensors for airbag deployment systems in automobiles - A microcar - Robot musician Inertia Sensor for Automobile Air Bag Deployment System Micro inertia sensor (accelerometer) in place: (Courtesy of Analog Devices, Inc) Sensor-on-a-chip: (2 mm x

3 mm- smaller than a rice grain) Micro Cars (Courtesy of Denso Research Laboratories, Denso Corporation, Aichi, Japan) Rice grains Robot musician (Waseda University, Japan) Over

100 micro-sensors and micro-actuators by MEMS technology

4 MEMS = a major milestone in Miniaturization C A leading technology for the 21st Century, and an inevitable trend in industrial products and systems development Miniaturization An irresistible trend in the New Century Miniaturization of Digital Computers - A remarkable case of miniaturization! The ENIAC Computer in

1946 A Lap-top Computer in

1996 A Palm-top Computer in

2003 Size:

106 down Power:

106 up Size:

108 down Power:

108 up This spectacular miniaturization took place in

50 years!! The ENIAC computer -

50 years later Principal Driving Force for the 21st Century Industrial Technology There has been increasing strong market demand for: Intelligent, Robust, Multi-functional, and Low-cost industrial products. Miniaturization is the only viable solution to satisfy such market demand Market Demand for Intelligent, Robusting, Smaller, Multi-Functional Products - the evolution of cellular phones Mobil phones

15 Years Ago: Current State-of-the Art: Transceive voice only Transceive voice+ others (Video-camera, e-mails, calendar, and access to Internet;

and a PC with key board;

GPS and multimedia entertainment) Size reduction Palm-top Wireless PC The only solution is to pack many miniature function components into the device

5 Miniaturization Makes Engineering Sense !!! ? Small systems tend to move or stop more quickly due to low mechanical inertia. It is thus ideal for precision movements and for rapid actuation. ? Miniaturized systems encounter less thermal distortion and mechanical vibration due to low mass. ? Miniaturized devices are particularly suited for biomedical and aerospace applications due to their minute sizes and weight. ? Small systems have higher dimensional stability at high temperature due to low thermal expansion. ? Smaller size of the systems means less space requirements. This allows the packaging of more functional components in a single device. ? Less material requirements mean low cost of production and transportation. ? Ready mass production in batches. Enabling Technologies for Miniaturization Miniature devices (1 nm -

1 mm) **

1 nm = 10-9 m ≈ span of

10 H2 atoms Microsystems Technology (MST) (1 μm -

1 mm)* Initiated in

1947 with the invention of transistors, but the term Micromachining was coined in

1982 *

1 μm = 10-6 m ≈ one-tenth of human hair Nanotechnology (NT) (0.1 nm C 0.

1 μm)** Inspired by Feynman in 1959, with active R&

D began in around

1995 There is a long way to building nanodevices! A top-down approach A bottom-up approach The Lucrative Revenue Prospects for Miniaturized Industrial Products Microsystems technology: $43 billion - $132 billion* by Year

2005 ( *High revenue projection is based on different definitions used for MST products) Nanotechnology: $50 million in Year

2001 $26.5 billion in Year

2003 (if include products involving parts produced by nanotechnology) $1 trillion by Year

2015 (US National Science Foundation) An enormous opportunity for manufacturing industry!! There has been colossal amount of research funding to NT by governments of industrialized countries around the world b/c of this enormous potential. Major Industrial Applications 1. Automotive Industry: Safety Engine and Power Trains Comfort and Convenience Vehicle Diagnostics and Health Monitoring 2. Healthcare Industry: Diagnostics and Monitoring Testing Surgical Tools Drug Discovery and Delivery 3. Aerospace Industry: Instrumentations Safety Navigation and Control Micro Satellites 4. Information Technology Industry: Read/write Heads Inkjet Printer Heads Position Sensors Flat Panel Displays 5. Telecommunication Industry: Optical Switching for Fiber Optical Couplings RF Switches Tunable Resonators, etc. 6. Industrial Products: Manufacturing Process Sensors Robotic Sensing Sensors for HVAC Systems Remote Sensing in Agriculture Environmental Monitoring 7. Consumer Products: Sporting Goods Smart Home Appliances Smart Toys and Games

6 34290

6807 13033

1595 TOTAL

40 0.15

3 0.006 Microspectrometers

60 60

20 15 Magnetoresistive sensors

360 30

150 6 Gyroscopes

430 90

240 24 Accelerometers

800 0.4

220 0.01 Infrared imagers

800 400

300 100 Chemical sensors

1300 309

600 115 Pressure sensors

2000 7

1150 4 Hearing aids

2800 4000

450 700 In vitro diagnostics

3700 0.8

1000 0.5 Heart pacemakers

10000 500

4400 100 Inkjet printer heads

12000 1500

4500 530 Hard disk drives Revenue ($ million)

2002 Units (million) Revenue ($ million)

1996 Units (millions) Product Types MST Global Markets for Established Product Types (Source: NEXUS 1998) $34 billion +

4205 1045

107 33 TOTAL

5 0.05 0.1 0.001 Electronic noses

20 2 0.5 0.01 Anti-collision sensors

30 30

10 10 Injection nozzles

70 20

10 1 Inclinometers

80 2

5 0.1 Micromotors

100 50 0.1 Micro relays

100 600

10 20 Coil-on-chip

300 1

10 0.1 Projection valves

500 100

1 0.01 Magneto optical heads

1000 100

0 0 Lab-on-chip (DNA)

1000 40

50 1 Optical switches

1000 100

10 1 Drug delivery systems Revenue ($ millions)

2002 Units (millions) Revenue ($ millions)

1996 Units (millions) Product Types MST Global Market for Emerging Products Source: NEXUS

1998 0

10 20

30 40

50 60

2000 2001

2002 2003

2004 2005 Year Revenue, $billion Market Growth of MST Products Source: NEXUS Source: Nexus=Network of Excellence in Multifunctional Microsystems of European Community $50 Billion MEMS and Microsystems Devices and Products Micro Sensors: Acoustic wave sensors Biomedical and biosensors Chemical sensors Optical sensors Pressure sensors Stress sensors Thermal sensors Micro ........